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  • Session 1 – Defect Inspection I
  • Micro-Photoluminescence Imaging of Dislocation Generation in 0.18m Power Semiconductor Devices with Deep Trenches

    • Bruce Greenwood, ON Semiconductor ;
    • J.P. Gambino, ON Semiconductor ;
    • L. Jastrzebski, Semilab USA LLC ;
    • G Nadudvari, Semilab Semiconductor Physics Laboratory Co. Ltd ;
    • D. T. Cseh, Semilab Semiconductor Physics Laboratory Co. Ltd ;
    • Laszlo Roszol, Semilab Semiconductor Physics Laboratory Co. Ltd ;
    • Gabor Molnar, Semilab Semiconductor Physics Laboratory Co. Ltd ;
    • Imre Lajtos, Semilab Semiconductor Physics Laboratory Co. Ltd